450 mm
Document # Document Name Publication Date
10065105B-ENG 450 mm Demonstration Test Method (DTM) 01/18/2012
36024TD ISMI 450 mm Equipment Performance Metrics v5.0 12/06/2010
06094783D-ENG SEMI S23 Application Guide and Total Equivalent Energy (TEE) CalcII User's Guide 11/08/2010
35672 ISMI 450 mm Equipment Performance Metrics v4.0 09/09/2010
10065100A-ENG 450 mm Factory Integration Maturity Assessment (FIMA) 06/17/2010
06124825B-ENG Guideline for Environmental Characterization of Semiconductor Process Equipment - Revision 2 12/10/2009
09095029A-ENG Application Guide for Manual Material Handling Requirements in SEMI S8 12/07/2009
34202 Combustible Materials Test Report 08/13/2009
33551TD 450 mm Equipment ESH Checklist 02/02/2009