Cleanroom

450 mm Transition

The overarching requirement for 450 mm manufacturing is to maintain the advantageous cost structure that has enabled continuing growth for industry. SEMATECH is committed to enabling a cost-effective transition through coordination and development of infrastructure, guidance, and industry readiness.

SEMATECH's 450 mm program plays a critical role in coordinating industry efforts on 450 mm wafer supply, standards setting, test wafer generation and equipment demonstration. Key components of the 450 mm program include:

  • 450 mm wafer availability to enable 450 mm equipment development
  • An interoperability test bed that supports the creation of testable factory architecture guidelines and to accelerate the formation of 450 mm standards
  • Creation of test wafers and definition of equipment performance metrics to enable 450 mm equipment development for demonstration
  • Prototype testing of 450 mm factory integration equipment
  • Development of EHS guidelines with an emphasis on “Green Manufacturing”
  • Proactive evaluation of 450 mm operational challenges
  • Timely coordination of strategic industry activities and collaboration with key suppliers

450 mm Factory Integration Readiness

Thorough evaluation and standards verification of 450 mm factory integration components is essential in order to prepare the industry for 2012 semiconductor pilots lines running processes on 450 mm wafers. The program's 450 mm interoperability test bed provides SEMATECH with the capability to conduct necessary testing of 450 mm factory integration components—including 450 mm wafer carriers, equipment loadports, equipment front end modules, and automated material handling systems (AMHS)—to assure manufacturing readiness of 450 mm fabs.

Interoperability Test Bed (ITB) Update to the SEMI 450 mm IPIC View document

Industry Briefings

SEMATECH holds a series of industry briefings on the progress being made to provide the infrastructure and momentum for 450 mm manufacturing readiness. The briefings, which typically take place 2-3 times a year, focus on silicon/test wafers, process and metrology, and factory infrastructure issues.

View presentations from past industry briefings.

450 mm Cost Sharing Program

SEMATECH is accepting submissions from process and metrology equipment suppliers for 450 mm tool transition projects to be considered for cost-sharing and other assistance. See details.

450 mm Wafer Loan Program

The 450 mm wafer loan program is designed to supply 450 mm wafers to suppliers in support of their efforts in developing equipment, materials, and processes for the 450 mm transition. See details.


Contact: Tom Jefferson - 450 mm Program Manager